Radiant energy – Inspection of solids or liquids by charged particles
Patent
1991-07-08
1992-08-11
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, H01J 3726
Patent
active
051381591
ABSTRACT:
White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.
REFERENCES:
patent: 4604520 (1986-08-01), Pohl
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4918309 (1990-04-01), Beha et al.
patent: 4985627 (1991-01-01), Gutierrez et al.
J. Appl. Phys. 59 (10), May 15, 1986; "Near-field Optical-scanning Microscopy"; by U. Durig et al.; pages 3318-3327.
Okada Takao
Takase Tsugiko
Berman Jack I.
Olympus Optical Co,. Ltd.
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