Radiant energy – Inspection of solids or liquids by charged particles
Patent
1990-04-03
1991-10-08
Anderson, Bruce C.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 2504421, G01N 2300, H01J 3700
Patent
active
050556800
ABSTRACT:
A scanning tunneling microscope is disclosed which includes a frame assembly having upper frame members coupled to lower frame members by an external vibration isolation structure, a sample carousel configured to receive at least one sample to be scanned, and a probe carousel configured to receive at least one probe module including a probe tip. The sample and probe carousels are coupled to the upper frame members and sample and probe actuators are provided to rotate the carousels. A positioning mechanism is used to maintain a scanning distance between the probe tip and the sample carousel. A control unit controls the overall operation of the actuators to rotate the carousels and the operation of the positioning mechanism to maintain the scanning distance.
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Kesmodel Larry
Kiser Michael W.
Anderson Bruce C.
LK Technologies, Inc.
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