Radiant energy – Inspection of solids or liquids by charged particles
Patent
1989-08-29
1991-08-06
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
250307, 250423F, H01J 3700
Patent
active
050380346
ABSTRACT:
A scanning tunneling microscope is arranged to cause a tunneling current to flow through a gap between a specimen and a probe housed in a vacuum chamber, and is provided with a working arrangement for reshaping the probe. The arrangement enables the reshaping of the probe without releasing a vacuum in the vacuum chamber.
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Hyomen Kaguku (Surface Science), vol. 8, No. 1 (1987), pp. 2-13.
Berman Jack I.
Mitsubishi Denki & Kabushiki Kaisha
Nguyen Kiet T.
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