Radiant energy – Inspection of solids or liquids by charged particles
250307, 2504401, 2504421, H01J 37067
A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.
patent: 4880975 (1989-11-01), Nishioka et al.
patent: 4894537 (1990-01-01), Blackford et al.
patent: 4945235 (1990-07-01), Nichioka et al.
Berman Jack I.
Mguyen Kiet T.
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