Scanning tunnel microscope equipped with scanning electron micro

Details Scanning tunnel microscope equipped with scanning electron micro Scanning tunnel microscope equipped with scanning electron micro

1991-05-07

1993-10-26

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

2504911, 250310, H01J 3728

Patent

active

052568768

ABSTRACT:
A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

REFERENCES:
patent: 4798989 (1989-01-01), Miyazaki et al.
patent: 4837435 (1989-06-01), Sakuhara et al.
patent: 4874945 (1989-10-01), Ohi
patent: 5081353 (1992-01-01), Yamada et al.
Takata et al, "Scanning Tunneling Microscope w/ release coarse positioners" Rev. Sci. Instrum. 60(4), Apr. 1989.
Vazquez et al., "Combination of a Scanning Tunneling Microscope with a Scanning Electron Microscope" Rev. Sci. Instrum. 59(8), Aug. 1988.

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