Scanning tunnel microscope capable of detecting electrons emanat

Details Scanning tunnel microscope capable of detecting electrons emanat Scanning tunnel microscope capable of detecting electrons emanat

1990-06-05

1992-03-24

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250305, 250310, H01J 37252, H01J 4148

Patent

active

050991175

ABSTRACT:
A scanning tunnel microscope having an emission tip, specimen holder and xyz movement mechanism as well as devices for applying a voltage between the emission tip and the specimen and for detecting the electrons emanating from the specimen can be used for verifying secondary electrons generated in the same surface region and/or an energy analysis of electrons emitted by the emission tip and scattered by the surface if a cylindrical mirror analyzer with assigned detector is arranged coaxially to the emission tip. With relatively high applied voltages, a cylindrically symmetrical correction electrode between the emission tip and the cylindrical mirror, arranged coaxially to the emission tip, is expedient, with which electrode the imaging properties of the analyzer open toward the specimen are made to approximate those of a conventional cylindrical mirror. A masking device allows a solid angle-oriented detection of scattered and secondary electrons. The outer cylinder of the cylindrical mirror may, at least in part, be made transmissive to photons, which are verified by a detector arranged on the outside. A channel multiplier plate with a fluorescent screen, provided opposite the emissions tip, allows detection of structural and/or emission properties of the emission tip by field ion microscopy or field electron microscopy.

REFERENCES:
patent: 3631238 (1971-12-01), MacDonald
patent: 4698502 (1987-10-01), Bednorz et al.
"Auger Electron Energy Analyzer Using a Cylindrical Mirror with Ring-to-Axis Focusing", T. V. Krachino et al, 2348 Soviet Physics Technical Physics 28 (1983), Oct., No. 10.
"Scanning Tunneling Microscope Combined with a Scanning Electron Microscope", Ch. Gerber et al, 8127 Review of Scientific Instruments 57 (1986), Feb., No. 2.

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