Scanning transmission electron microscopes

Details Scanning transmission electron microscopes Scanning transmission electron microscopes

1983-06-29

1985-04-30

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

250357, G01N 2300

Patent

active

045146292

ABSTRACT:
In a scanning transmission electron microscope 1 the image of the diffraction pattern formed on a phosphor screen 6 as a result of electron beam impingement on a point on the specimen 4 is converted by a camera 7 into a video signal and digitized in an ADC convertor 9 and stored in a digital store 10. The stored signal is then modified by a weighting factor representing a notional pattern overlaying screen 6. The weighting factor may have one of two binary values, representing a notional opaque and transparent pattern, or may have a multiplicity of different values. The modified signals are then added together to provide a picture value for the point of impingement. By this means a complete picture is built up point-by-point.
To speed up the picture taking operation diffraction images from different points may be displayed on different parts of screen 6 so that several images can be scanned together by camera 7.

REFERENCES:
patent: 3626184 (1971-12-01), Crewe
patent: 3675203 (1972-07-01), Baumann
patent: 4068123 (1978-01-01), Kokubo
patent: 4160162 (1979-07-01), Muller et al.
patent: 4399360 (1983-08-01), Fotino

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