Scanning transmission electron microscope including an improved

Details Scanning transmission electron microscope including an improved Scanning transmission electron microscope including an improved

1976-06-15

1977-07-26

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

250311, H01J 3726, G01N 2304

Patent

active

040385434

ABSTRACT:
A scanning transmission electron microscope including an evacuated housing and a phase contrast device in which the imaging ray cone of the microscope generates a hologram having zones of positive or negative interference. The microscope includes means for separately detecting and measuring the intensities of the zones of positive or negative interference and a picture display means coupled to and controlled by the detecting means for monitoring the intensities detected and measured.
The improvement of the invention comprises an improved detecting means including an image converter disposed in the electron beam path of the microscope on which the hologram is projected for converting the hologram into an optical image. Planar image masks are disposed outside of the microscope housing and have transparent and opaque areas which correspond to the zones of positive and negative interference of the hologram. An image transmission means, disposed adjacent the image converter, transmits the optical image with unchanged relative intensity distribution to the masks, and means, disposed adjacent the masks and coupled to the display means, measures the intensity of light transmitted through the transparent areas of the mask and generates an output signal corresponding to the intensities measured and detected for display on the display means.
A method for correcting astigmatism and/or defocusing in such a microscope is also disclosed.

REFERENCES:
patent: 3504176 (1970-03-01), Thon
patent: 3908124 (1975-09-01), Rose

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