Scanning transmission electron microscope and scanning...

Details Scanning transmission electron microscope and scanning... Scanning transmission electron microscope and scanning...

2008-05-13

2008-05-13

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S307000, C250S306000, C356S401000, C356S370000, C356S399000, C356S070000

Reexamination Certificate

active

11806120

ABSTRACT:
A scanning transmission electron microscope for scanning a primary electron beam on a sample, detecting a transmitted electron from the sample by a detector, and forming an image of the transmitted electron. The scanning transmission electron microscope includes an electron-optics system which enables switching back the transmitted electron beam to the optical axis by a predetermined quantity, and a determining unit for determining the quantity based on a displacement of the transmitted electron with respect to the detector caused by the scanning of the primary electron beam.

REFERENCES:
patent: 2006/0113469 (2006-06-01), Baba
patent: 2001-093459 (2001-04-01), None

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