Scanning transmission electron microscope and scanning...

Details Scanning transmission electron microscope and scanning... Scanning transmission electron microscope and scanning...

2007-06-05

2007-06-05

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S307000, C250S306000, C356S401000, C356S370000, C356S399000, C355S077000

Reexamination Certificate

active

11328173

ABSTRACT:
A scanning transmission electron microscope which enhances correction accuracy of a de-scanning coil for canceling a transmitted-electron-beam position change on an electron detector. Here, this transmitted-electron-beam position change appears in accompaniment with a primary-electron-beam position change on a specimen caused by a scanning coil. First, control over the scanning coil is digitized. Moreover, while being synchronized with a digital control signal resulting from this digitization, values in a de-scanning table registered in a FM(2) are outputted to the de-scanning coil. Here, the de-scanning table is created as follows: Diffraction images before and after activating the scanning coil and the de-scanning coil are photographed using a camera. Then, based on a result acquired by analyzing a resultant displacement quantity of the diffraction images by the image processing, the de-scanning table is created.

REFERENCES:
patent: 2006/0113469 (2006-06-01), Baba et al.
patent: 2001-093459 (2001-04-01), None

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