Scanning reflection electron diffraction microscope

Details Scanning reflection electron diffraction microscope Scanning reflection electron diffraction microscope

1992-01-29

1997-10-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250310, 250314, H01J 3726

Patent

active

056751486

ABSTRACT:
A scanning reflection electron diffraction microscope causes a primary electron beam from its electron gun to be reflectively diffracted from a sample and a diffraction pattern to be formed on a fluorescent screen. An optical lens reduces this diffraction pattern in size and forms its reduced image on a photoelectric surface, thereby producing an image-carrying electron beam. Deflected by a deflecting system including a deflecting coil and a condenser coil, the image-carrying electron beam is detected by an electron-multiplier such that a diffraction pattern is displayed on a cathode ray tube.

REFERENCES:
patent: 4211924 (1980-07-01), Muller et al.
patent: 5010250 (1991-04-01), Elsayed-Ali et al.
patent: 5093573 (1992-03-01), Mikoshiba et al.

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