Scanning projection optical device

Details Scanning projection optical device Scanning projection optical device

1996-12-10

1997-09-30

Phan, James

Optical: systems and elements

Deflection using a moving element

359727, 359733, 359736, G02B 2608

Patent

active

056731353

ABSTRACT:
A scanning projection optical device is disclosed which can be constructed using relatively small optical members, which employs a catadioptric system that is advantageous to attain a high NA, and which has arc-shaped object and image regions located out of an optical axis and a projecting magnification of 1. In the scanning projection optical device, the catadioptric system is an optical system telecentric in both object- and image- field sections, and has a first, positive power lens-system, a second, substantially non-power lens-system, and a concave mirror; the first, positive power lens-system and the concave mirror cooperatively satisfy Petzval condition to correct field curvature; and without impairing the Petzval condition satisfied by the first lens-system and the concave mirror, the second lens-system corrects aberration of the arc-shaped region centering around the optical axis.

REFERENCES:
patent: 3748015 (1973-07-01), Offner
patent: 5369521 (1994-11-01), Yoshino
patent: 5448416 (1995-09-01), Okumura et al.
J. Dyson, "Unit Magnification Optical System without Seidel Aberrations," The Optical Society of America, vol. 49, No. 7, pp. 713-716 (Jul. 1959).

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