Radiant energy – Inspection of solids or liquids by charged particles
Patent
1998-03-25
1999-12-14
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
324458, 324690, G01R 2912
Patent
active
060021314
ABSTRACT:
A system for scanning and measuring a surface charge of a sample immersed in a conductive medium, such as an aqueous electrolytic solution or a gel, or positioned on a conducting plate. The system has a semiconductor with a probing surface clad in a charge-sensitive layer. The probing surface moves over the sample during scanning while a bias voltage V.sub.BIAS is applied to create a depletion layer in the semiconductor and to induce the system to alter a measurable electrical property. The electrical property is monitored with the aid of a measuring device and the measurement is correlated to the sample's surface charge. In a preferred embodiment the semiconductor is a part of a cantilever structure of the type having a probing tip and the probing surface is located on the apex of the probing tip thereby enabling examination of the topology and surface charge of the sample concurrently.
REFERENCES:
patent: 4969978 (1990-11-01), Tomita et al.
patent: 4985627 (1991-01-01), Gutierrez et al.
patent: 5065103 (1991-11-01), Slinkman et al.
Stern, J., et al., Deposition and imaging of localized charge on insulator surfaces using a force microscope, Appl. Phys. Lett., 53, p. 2717, 1988.
Terris, B., et al., Contact Electrification Using Force Microscopy, Am. Phys. Soc., 63(24), pp. 2669-2672, 1989.
Manalis Scott R.
Minne Stephen C.
Quate Calvin F.
Berman Jack I.
The Board of Trustees of the Leland Stanford Junior University
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