Scanning probe microscopy system and method of measurement...

Details Scanning probe microscopy system and method of measurement... Scanning probe microscopy system and method of measurement...

2006-08-29

2006-08-29

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C073S105000

Reexamination Certificate

active

07098453

ABSTRACT:
A scanning probe microscopy system has a cantilever having a probe at a distal end thereof and a heating unit for heating the sample. A moving unit effects relative movement between the cantilever probe and the sample to bring the cantilever probe into contact with a surface of the sample for measuring a property of the sample. A shielding unit shields between the cantilever probe and the sample during heating of the sample by the heating unit.

REFERENCES:
patent: 6389886 (2002-05-01), Daniels et al.

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