Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-07-25
2006-07-25
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
C427S256000, C264S317000, C264S293000
Reexamination Certificate
active
07081624
ABSTRACT:
A method for fabricating scanning probe microscopy (SPM) probes is disclosed. The probes are fabricated by forming a structural layer on a substrate, wherein the substrate forms a cavity. A sacrificial layer is located between the substrate and the structural layer. Upon forming the structural layer, the sacrificial layer is selectively removed, and the probe is then released from the substrate. The substrate may then later be reused to form additional probes. Additionally, a contact printing method using a scanning probe microscopy probe is also disclosed.
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Bullen David
Liu Chang
Wang Xuefeng
Zou Jun
Evan Law Group LLC
Leybourne James J.
The Board of Trustees of the University of Illinois
Wells Nikita
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