Radiant energy – Inspection of solids or liquids by charged particles
Reexamination Certificate
2006-04-25
2009-02-03
Font, Frank G (Department: 2883)
Radiant energy
Inspection of solids or liquids by charged particles
C250S307000, C250S309000, C250S310000, C250S311000
Reexamination Certificate
active
07485856
ABSTRACT:
A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.
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El Shammaa Mary A
Font Frank G
General Nanotechnology LLP
Townsend and Townsend / and Crew LLP
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