Scanning probe microscopy

Details Scanning probe microscopy Scanning probe microscopy

1991-11-19

1992-09-15

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3700

Patent

active

051480263

ABSTRACT:
A probe arranged to oppose a sample is coupled to a driving portion constituted by an actuator capable of obtaining a large expansion/contraction amount and an actuator capable of obtaining a small expansion/contraction amount. In order to keep the gap length between the sample and the probe constant, a first gap length control system drives the actuator and a second gap length control system having a driving time constant smaller than that of the first gap length control system drives the actuator in response to changes in gap length between the sample and the probe.

REFERENCES:
patent: 4043577 (1991-08-01), Pohl et al.
patent: 4877957 (1989-10-01), Okada et al.
patent: 5025153 (1991-06-01), Okada et al.
patent: 5059793 (1991-10-01), Miyamoto et al.
Surface Science 126 (1983) 236-244, North-Holland Publishing Co., "Scanning Tunneling Microscopy", G. Binnig et al.
G. E. Poirier et al., A New Ultra-High Vacuum Scanning Tunneling Microscope Design for Surface Science Studies, pp. 3113-3118, Review of Scientific Instruments, vol. 60, No. 10, 1989 American Institute of Physics.
M. O. Watanabe et al., High-Temperature Scanning Tunneling Microscope, pp. 327-329, vol. 8, No. 1, Journal of Vacuum Science and Technology: Part A, Jan. 1990, New York, N.Y.

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