Scanning probe microscopy

Details Scanning probe microscopy Scanning probe microscopy

1993-02-01

1994-12-06

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

2504431, H01J 37252

Patent

active

053713656

ABSTRACT:
There is provided a scanning probe microscopy comprising a probe 6 situated to face the surface of an sample 1, a first piezoelectric element 8 for moving the sample 1 and the probe 6 relative to each other in a first direction perpendicular to the surface of the sample, and second and third piezoelectric elements 3 and 4 for moving the probe and the sample relative to each other in second and third directions perpendicular to the first direction, thereby enabling the probe to scan the surface of the sample, wherein at least one of the first to third piezoelectric elements 8, 3 and 4, which is closest to the sample 1, is formed of a single crystal.

REFERENCES:
patent: 4520570 (1985-06-01), Bednorz et al.
patent: 4772817 (1988-09-01), Aida et al.
patent: 5047637 (1991-09-01), Toda
patent: 5216631 (1993-06-01), Sliwa

Affiliated with

Also associated with

Rating

Scanning probe microscopy does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscopy, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscopy will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-216519