Scanning probe microscope with scan correction

Details Scanning probe microscope with scan correction Scanning probe microscope with scan correction

1998-12-09

2000-05-02

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Methods

H01J 3700

Patent

active

060575476

ABSTRACT:
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

REFERENCES:
patent: 5210410 (1993-05-01), Barrett
patent: 5394741 (1995-03-01), Kajimura et al.

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