Radiant energy – Inspection of solids or liquids by charged particles
Patent
1997-04-01
2000-10-10
Nguyen, Kiet T.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 3726
Patent
active
061304271
ABSTRACT:
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
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Alexander John
Kirk Michael
Linker Frederick I.
Park Sang-il
Park Sung
Nguyen Kiet T.
Park Scientific Instruments
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