Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1999-02-19
2000-10-31
Larkin, Daniel S.
Measuring and testing
Surface and cutting edge testing
Roughness
G01B 528, G01B 734
Patent
active
061385034
ABSTRACT:
A scanning force microscope system that employs a laser (76) and a probe assembly (24) mounted in a removable probe illuminator assembly (22), that is mounted to the moving portion of a scanning mechanism. The probe illuminator assembly may be removed from the microscope to permit alignment of said laser beam onto a cantilever (30) after removal. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly. The scanning probe microscope assembly (240) supports a scanning probe microscope (244). Scanning probe microscope (244) holds a removable probe sensor assembly (242). Removable probe sensor assembly (242) may be transported and conveniently attached to the adjustment station (250) where the probe sensor assembly parameters may be observed and adjusted if necessary. The probe sensor assembly (242) may then be attached to the scanning probe microscope (244).
REFERENCES:
patent: Re34489 (1993-12-01), Hansma
patent: Re35514 (1997-05-01), Albrecht et al.
patent: 4935634 (1990-06-01), Hansman et al.
patent: 5025658 (1991-06-01), Elings et al.
patent: 5144833 (1992-09-01), Amer et al.
patent: 5189906 (1993-03-01), Elings et al.
patent: 5231286 (1993-07-01), Kajimura et al.
patent: 5245863 (1993-09-01), Kajimura et al.
patent: 5260824 (1993-11-01), Okada et al.
patent: 5388452 (1995-02-01), Harp et al.
patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5406833 (1995-04-01), Yamamoto
patent: 5440920 (1995-08-01), Jung et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5481908 (1996-01-01), Gamble et al.
patent: 5496999 (1996-03-01), Linker et al.
patent: 5524479 (1996-06-01), Harp et al.
patent: 5560244 (1996-10-01), Prater et al.
patent: 5569918 (1996-10-01), Wang
patent: 5587523 (1996-12-01), Jung et al.
patent: 5625142 (1997-04-01), Gamble
patent: 5705814 (1998-01-01), Young et al.
patent: 5808977 (1998-09-01), Koyanagi et al.
patent: 5811802 (1998-09-01), Gamble
patent: 5847383 (1998-12-01), Tong
patent: 5850038 (1998-12-01), Ue
patent: 5861550 (1999-01-01), Ray
patent: 5874669 (1999-02-01), Ray
Y. Martin et al., "Atomic Force Microscope-Force Mapping and Profiling On a Sub 100A Scale", J. Appl. Phys., vol. 61, No. 10, May 15, 1987, pp. 4723-4729.
D. R. Baselt et al., "Scanned Cantilever Atomic Force Microscope", Rev. Sci. Instrum., vol. 64, No. 04, Apr. 1993, pp. 908-911.
K. O. van der Werf et al., "Compact Stand-Alone Atomic Force Microscope", Rev. Sci. Instrum., vol. 64, No. 10, Oct. 1993, pp. 2892-2897.
S. M. Clark et al., "A High Performance Scanning Force Microscope Head Design", Rev. Sci. Instrum., vol. 64, No. 04, Apr. 1993, pp. 904-907.
B. Gasser et al., "Design of a `Beetle-Type` Atomic Force Microscope Using the Beam Deflection Technique", Rev. Sci. Instrum., vol. 67, No. 05, May 1996, pp. 1925-1929.
IBM Technical Disclosure Bulletin, vol. 30, No. 6, Nov. 1987, Force Measurement With High Sensitivity Application to Surface Inspection at the Angstrom Scale.
P.S. Jung et al., "Novel Stationary-Sample Atomic orce Microscope with Beam-Tracking Lens", Electronics Letters, Feb. 4, 1993, vol. 29, No. 3, pp. 264-265.
Larkin Daniel S.
Raymax Technology, Inc.
LandOfFree
Scanning probe microscope system including removable probe senso does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Scanning probe microscope system including removable probe senso, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope system including removable probe senso will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2039770