Scanning probe microscope providing unobstructed top down and bo

Details Scanning probe microscope providing unobstructed top down and bo Scanning probe microscope providing unobstructed top down and bo

1997-02-28

1998-12-29

Anderson, Bruce

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3726

Patent

active

058544879

ABSTRACT:
Scanning probe microscopes and scanning probe heads are provided having improved optical visualization and sample manipulation capabilities. The SPMs and SPM heads include at least one flexure stage for scanning in the x, y and/or z directions. In a preferred embodiment, the SPMs or SPM heads include flexure stages for scanning in the x, y and z directions. The z scanning stage is preferably positioned outside the lateral footprint of the x-y flexure stage so that a probe extending from the z scanning stage is outside the lateral footprint of the instrument. The SPMs and SPM heads are configured to provide top down and bottom up optical views of the sample and/or the probe and enable simultaneous scanning probe microscopy and optical imaging of a sample to be performed. The SPMs and SPM heads are designed to be readily combinable with existing upright and inverted optical microscopes currently available from various major manufacturers.

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