Scanning probe microscope having a single viewing device for on-

Details Scanning probe microscope having a single viewing device for on- Scanning probe microscope having a single viewing device for on-

1996-09-13

1998-02-03

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 73105, H01J 3726

Patent

active

057147566

ABSTRACT:
An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.

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patent: 5394741 (1995-03-01), Kajimura et al.
patent: 5508517 (1996-04-01), Onuki et al.
patent: 5517027 (1996-05-01), Nakagawa et al.

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