Measuring and testing – Surface and cutting edge testing – Roughness
Patent
1994-07-15
1996-07-23
Williams, Hezron E.
Measuring and testing
Surface and cutting edge testing
Roughness
738665, G01B 528
Patent
active
055378633
ABSTRACT:
A scanning probe microscope according to present invention comprises a cantilever for interaction with a surface, the cantilever having a self vibrator therein for vibrating the cantilever, the cantilever having a self strain detector therein. The self vibrator and self strain detector comprise a piezoelectric layer and electrodes, and the piezoelectric layer is disposed between these electrodes.
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Fujii Toru
Fujiu Takamitsu
Nomura Tatsushi
Sango Yoshinori
Watanabe Shunji
Larkin Daniel S.
Nikon Corporation
Williams Hezron E.
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