Scanning probe microscope employing adjustable tilt and unitary

Details Scanning probe microscope employing adjustable tilt and unitary Scanning probe microscope employing adjustable tilt and unitary

1990-05-23

1992-04-07

Berman, Jack I.

Radiant energy

Inspection of solids or liquids by charged particles

250307, 25044011, 25044211, G21K 510

Patent

active

051030950

ABSTRACT:
This invention is a scanning probe microscope which uses three separate motorized legs to adjust the distance between the probe and sample and to adjust the tilt between the probe and the sample. The microscope is shown configured in various ways. One form is a scanner on a base in which the base contains the sample and legs. Another is a scanner which contains the legs and rests on the sample, or may also rest on a support that spans a larger sample allowing translation of the sample independent of the scanner. Another is a scanner which contains the legs and is mounted so that a sample holder sits on the legs. The latter configuration allows for easy access to the sample. One variation of this configuration has provision for the mounting of several samples which can be sequenced for probing automatically.

REFERENCES:
patent: 4785177 (1988-11-01), Besocke
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4947042 (1990-08-01), Nishioka et al.

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