Scanning probe microscope and specimen surface structure...

Details Scanning probe microscope and specimen surface structure... Scanning probe microscope and specimen surface structure...

2007-07-10

2007-07-10

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000, C073S105000

Reexamination Certificate

active

10503701

ABSTRACT:
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probe21is vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.

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