Scanning probe microscope and scanning method

Details Scanning probe microscope and scanning method Scanning probe microscope and scanning method

2011-01-18

2011-01-18

Berman, Jack I (Department: 2881)

Scanning-probe techniques or apparatus; applications of scanning

Scanning or positioning arrangements, i.e., arrangements for...

Fine scanning or positioning

C850S001000, C850S002000, C850S005000, C850S007000

Reexamination Certificate

active

07874016

ABSTRACT:
To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

REFERENCES:
patent: 5283442 (1994-02-01), Martin et al.
patent: 5412980 (1995-05-01), Elings et al.
patent: 6881954 (2005-04-01), Morimoto et al.
patent: 2001/0012394 (2001-08-01), Yoshida
patent: 2006/0113472 (2006-06-01), Shigeno et al.
patent: 2006/0283240 (2006-12-01), Struckmeier et al.
patent: 2008/0087077 (2008-04-01), Mininni
patent: 2732771 (1997-12-01), None
patent: 2002-14025 (2002-01-01), None
patent: 2005-69851 (2005-03-01), None

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