Scanning probe microscope and scanning method

Scanning-probe techniques or apparatus; applications of scanning – Scanning or positioning arrangements – i.e. – arrangements for... – Fine scanning or positioning

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C850S001000, C850S002000, C850S005000, C850S007000

Reexamination Certificate

active

07874016

ABSTRACT:
To realize to adapt to a shape of a surface, shorten a measurement time period and promote a measurement accuracy by setting a sampling interval in accordance with a slope of the shape of the surface and controlling a stylus in accordance with the interval, there is provided a scanning probe microscope, in which in scanning the stylus, an observation data immediately therebefore is stored as a history, the sampling interval in X or Y direction is set at each time based on a shape of the observation data, and the stylus is scanned to a successive sampling position.

REFERENCES:
patent: 5283442 (1994-02-01), Martin et al.
patent: 5412980 (1995-05-01), Elings et al.
patent: 6881954 (2005-04-01), Morimoto et al.
patent: 2001/0012394 (2001-08-01), Yoshida
patent: 2006/0113472 (2006-06-01), Shigeno et al.
patent: 2006/0283240 (2006-12-01), Struckmeier et al.
patent: 2008/0087077 (2008-04-01), Mininni
patent: 2732771 (1997-12-01), None
patent: 2002-14025 (2002-01-01), None
patent: 2005-69851 (2005-03-01), None

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Scanning probe microscope and scanning method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe microscope and scanning method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe microscope and scanning method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2645928

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.