Scanning probe microscope and method of analyzing sample using s

Details Scanning probe microscope and method of analyzing sample using s Scanning probe microscope and method of analyzing sample using s

1997-09-25

2000-10-03

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250307, H01J 3720

Patent

active

061276820

ABSTRACT:
There is disclosed a scanning probe microscope capable of operating either as a scanning tunneling microscope (STM) or as an atomic force microscope (AFM). The probe microscope uses only one scanner in both modes of operation. When the instrument is operated in the AFM mode, the scanner is mounted to a base stage. The distance between a sample and an AFM tip is controlled. The sample is held to the front end of the scanner. An atomic force exerted between the tip and the sample is measured. When the instrument is operated in the STM mode, a sample stage is mounted to the base stage. The scanner is held opposite to the sample stage. A voltage is applied between the sample held to the sample stage and an STM tip attached to the front end of the scanner. The induced tunneling current between the STM tip and the sample is measured.

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"Scanning Tunneling Microscopy and Atomic Force Microscopy: Application to Biology and Technology", P. K. Hansma, V.B. Elings, O. Marti, C.E. Bracker, Science, vol. 242, pp. 209-216 Oct. 14, 1988.

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