Radiant energy – Inspection of solids or liquids by charged particles
Patent
1995-05-19
1997-10-21
Berman, Jack I.
Radiant energy
Inspection of solids or liquids by charged particles
H01J 3728
Patent
active
056799527
ABSTRACT:
A plurality of scanning tunnelling microscopes and operating them at a time, a control circuit, a memory circuit and an arithmetic circuit are integrated on the same chip and movement of a movable electrode is controlled by the arithmetic circuit and control circuit on the basis of information stored in the memory circuit. An actuator utilizing electrostatic force is formed and the scanning tunnelling microscope is operated by the actuator. A plurality of movable electrodes are provided with scanning probes, respectively, and the positions of the plurality of movable electrodes relative to objects are controlled at a time.
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Lutwyche Mark I.
Wada Yasuo
Berman Jack I.
Hitachi , Ltd.
Nguyen Kiet T.
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