Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1997-08-06
2000-08-01
Ballato, Josie
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324751, 324754, 250306, 250307, G01R 31302, G01R 31305, G01R 3102, G03N 2300
Patent
active
060971975
ABSTRACT:
A conductive cantilever having a conductive probe on its free end is supported by a piezoelectric element, which oscillates upon reception of an AC voltage from a first AC voltage supply unit. An AC voltage is applied between a conductive sample and the probe by a variable DC voltage supply unit and a second AC voltage supply unit. An AM demodulator demodulates a signal from a displacement meter at an angular frequency of the first AC voltage supply unit. A lowpass filter extracts a DC component from an output signal from the AM demodulator, and a synchronism detector extracts a component concerning to the angular frequency twice as high as that of the second AC voltage supply unit from the AM demodulator output signal. A Z controller controls a position of a tube scanner based on an output signal from the subtracter which subtracts an output signal of the synchronism detector from an output signal of the lowpass filter. A data processing unit maps configuration data from the Z controller and surface potential data from a voltage control circuit, referring to XY data from an XY scanning circuit, such that a configuration image and a potential distribution image of the sample are obtained.
REFERENCES:
patent: 5142147 (1992-08-01), Kawamata et al.
patent: 5376790 (1994-12-01), Linker et al.
patent: 5902928 (1999-05-01), Chen et al.
patent: 5939719 (1999-08-01), Park et al.
T.R. Albrecht et al; "Frequency Modulation Detection Using High-Q Cantilevers for Enhanced Force Microscope Sensitivity"; Jan. 15, 1991; pp. 668-673; J. Appl. Phys. vol. 69, No. 2.
Matsuyama Katsuhiro
Morita Seizo
Sakai Nobuaki
Sugawara Yasuhiro
Ballato Josie
Hollington Jermele M.
Olympus Optical Co,. Ltd.
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