Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1998-07-08

1999-12-21

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

73105, G01B 528

Patent

active

060052465

ABSTRACT:
There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a force gradient acting between the probe tip and the sample. The gradient is represented by the output from a frequency-to-voltage converter.

REFERENCES:
patent: 5267471 (1993-12-01), Abraham et al.
patent: 5631410 (1997-05-01), Kitamura
"Kelvin Probe Force Microscopy", Nonnenmacher, O'Boyle and Wickramasinghe, Appl. Phys. Lett., vol. 58, No. 25, Jun. 24, 1991, pp. 2921-2923.

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