Scanning probe microscope

Details Scanning probe microscope Scanning probe microscope

1991-05-02

1992-07-07

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

25044211, 310328, H01J 3700

Patent

active

051285444

ABSTRACT:
A scanning probe microscope having a tip, scanning piezoelectric units for causing the tip to scan and even-numbered z-movement piezoelectric elements for moving the tip along the z-axis. The electrodes at the outer faces of the z-movement piezoelectric elements are grounded. Thus, no AC coupling occurs between the tip and the z-axis electrode opposite to the tip. Introduction of noises into the resulting tunnel current is prevented and the image quality of the sample image is greatly improved.

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patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 4945235 (1990-07-01), Nishioka et al.
patent: 4998016 (1991-03-01), Nose et al.

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