Scanning probe devices and methods for fabricating same

Details Scanning probe devices and methods for fabricating same Scanning probe devices and methods for fabricating same

2011-03-29

2011-03-29

Larkin, Daniel S (Department: 2856)

Measuring and testing

Surface and cutting edge testing

Roughness

C216S002000, C216S011000, C850S040000, C850S060000

Reexamination Certificate

active

07913544

ABSTRACT:
The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.

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