Radiant energy – Inspection of solids or liquids by charged particles – Analyte supports
Reexamination Certificate
2009-05-29
2011-10-11
Souw, Bernard E (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Analyte supports
C250S440110, C310S311000, C310S323060
Reexamination Certificate
active
08035089
ABSTRACT:
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.
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Kusaka Takao
Seki Jun-ichi
Yasuda Susumu
Yoshimatsu Nobuki
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Souw Bernard E
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