Scanning probe apparatus

Details Scanning probe apparatus Scanning probe apparatus

2006-12-18

2009-08-04

Souw, Bernard E (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S307000, C250S309000, C250S442110, C073S105000, C977S849000, C977S850000, C977S851000

Reexamination Certificate

active

07569817

ABSTRACT:
In a scanning probe apparatus capable of always effectively canceling an inertial force to suppress vibration even in repetitive use while replacing a sample holding table or a probe, a stage for a sample or the probe includes a drive element for moving the sample holding table and movable portions movable in a direction in which an inertial force generated during movement of the sample holding table. The stage is configured so that the drive element, the movable portions, and the sample holding table or the probe are integrally detachably mountable to a main assembly of the scanning probe apparatus.

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