Scanning probe and an approach mechanism therefor

Details Scanning probe and an approach mechanism therefor Scanning probe and an approach mechanism therefor

1996-12-31

1998-06-16

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

H01J 3704

Patent

active

057675147

ABSTRACT:
A method and apparatus for tunnelling microscopy utilising a tunnelling microscope head (11) having a tip (15) which is moveable by a driver (25) towards a sample (28) and is stopped in its advance as an electron flow between the tip and the sample is detected . The tip (15) is advanced towards the sample via a piezoelectric member (24) at a one voltage level, and on detection of the electron flow the voltage level of the piezoelectric member (24) is changed causing the piezoelectric member (24) to retract, stopping the advance of the tip (15) and stopping the driver (25) within the retraction distance.

REFERENCES:
patent: 4880975 (1989-11-01), Nishioka et al.
patent: 5198715 (1993-03-01), Elings et al.
patent: 5200617 (1993-04-01), Hayes et al.
patent: 5296704 (1994-03-01), Mishima et al.

Affiliated with

Also associated with

Rating

Scanning probe and an approach mechanism therefor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning probe and an approach mechanism therefor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning probe and an approach mechanism therefor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1728783