Scanning photoelectron microscope

Details Scanning photoelectron microscope Scanning photoelectron microscope

1995-05-25

1996-10-08

Anderson, Bruce C.

Radiant energy

Inspection of solids or liquids by charged particles

250305, G01N 2322

Patent

active

055634117

ABSTRACT:
A scanning photoelectron microscope comprises a stage on which a sample is placed in a state in which gas around the sample is present, a light source emitting light of a wavelength capable of causing photoelectrons to be emitted from the sample, an optical system for condensing the light from the light source on the sample, scanning means for scanning the sample and the light relative to each other, and detecting means capable of applying positive potential to the sample, and detecting the photoelectrons created from the sample by the condensing, through the gas.

REFERENCES:
patent: 4785182 (1988-11-01), Mancuso
patent: 4912737 (1990-03-01), Ohsuka et al.
patent: 5045696 (1991-09-01), Hirose
patent: 5119411 (1992-06-01), Nakamura
patent: 5138158 (1992-08-01), Ninomiya et al.
patent: 5393980 (1995-02-01), Yost et al.

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