Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Patent
1986-02-21
1987-06-23
Church, Craig E.
Radiant energy
Inspection of solids or liquids by charged particles
Electron probe type
250309, 250311, H01J 37256, H01J 3728
Patent
active
046755241
ABSTRACT:
A beam generator in a scanning particle microscope reduces energetic Boersch effect on the probe diameter to improve resolution by enabling beam particles to traverse a first beam crossover point with low energy and subsequently reaccelerating the beam particles to high energies while traversing the microscope's electro-optical column for subsequent deceleration shortly before reaching a specimen. An extraction electrode is provided between a Wehnelt electrode and an anode at a positive potential relative to a cathode, wherein the positive potential of the extraction electrode is substantially less than a positive potential at the anode.
REFERENCES:
patent: 3691377 (1972-09-01), Matsui et al.
patent: 4330707 (1982-05-01), Manzke
Frosien Juergen
Spehr Rainer
Berman Jack I.
Church Craig E.
Siemens Aktiengesellschaft
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