Scanning particle microscope with diminished boersch effect

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type

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250309, 250311, H01J 37256, H01J 3728

Patent

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046755241

ABSTRACT:
A beam generator in a scanning particle microscope reduces energetic Boersch effect on the probe diameter to improve resolution by enabling beam particles to traverse a first beam crossover point with low energy and subsequently reaccelerating the beam particles to high energies while traversing the microscope's electro-optical column for subsequent deceleration shortly before reaching a specimen. An extraction electrode is provided between a Wehnelt electrode and an anode at a positive potential relative to a cathode, wherein the positive potential of the extraction electrode is substantially less than a positive potential at the anode.

REFERENCES:
patent: 3691377 (1972-09-01), Matsui et al.
patent: 4330707 (1982-05-01), Manzke

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