Scanning particle microscope

Details Scanning particle microscope Scanning particle microscope

1985-07-02

1987-12-15

Church, Craig E.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

250309, 250311, 250398, H01J 3704

Patent

active

047135433

ABSTRACT:
There is disclosed a scanning particle microscope in which the adverse influence of the Boersch effect is reduced. This is achieved by providing an elastrostatic retardation element in the particle optics unit to decelerate the particle from a first energy, at which the particles are generated, to a second energy which is less than half of the first energy.

REFERENCES:
patent: 3760180 (1973-09-01), Weber
patent: 3792263 (1974-02-01), Hashimoto et al.
patent: 4075488 (1978-02-01), Okayama et al.
patent: 4277679 (1981-07-01), Feuerbaum
patent: 4330707 (1982-05-01), Manzke
patent: 4439685 (1984-03-01), Plies
"On the Theory of the Boersch Effect", Rose et al, Optik 57 (1980), No. 3, pp. 339-364.
"Energy Broadening in High-Density Electron and Ion Beams; The Boersch Effect", Rose et al, Advances in Electronics and Electron Physics, Supplement 13C, 1983.

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