Scanning particle beam instrument

Details Scanning particle beam instrument Scanning particle beam instrument

2008-03-25

2008-03-25

Berman, Jack I. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S201100, C250S201300

Reexamination Certificate

active

11208492

ABSTRACT:
A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

REFERENCES:
patent: 3886305 (1975-05-01), Yew et al.
patent: 4099054 (1978-07-01), Okumura et al.
patent: 4249244 (1981-02-01), Shofner et al.
patent: 4433247 (1984-02-01), Turner
patent: 5825670 (1998-10-01), Chernoff et al.
patent: 6852982 (2005-02-01), Bierhoff et al.

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