Scanning microscope

Details Scanning microscope Scanning microscope

1997-06-04

1999-07-27

Nguyen, Kiet T.

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

H01J 3726

Patent

active

059294396

ABSTRACT:
A scanned image to be observed or to be recorded is formed by a plurality of two-dimensional scanning times (N times), an irradiating charged particle beam or a light beam is blanked in a two-dimensional scanning unit, and the averaged irradiation intensity is adjusted by thinning a plurality (<N) of scanning times among the N times of scanning.

REFERENCES:
patent: 3628012 (1971-12-01), Plows et al.
patent: 3714422 (1973-01-01), Hosoki et al.
patent: 3795808 (1974-03-01), Drayton et al.
patent: 5500528 (1996-03-01), Matsui et al.

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