Scanning mechanism for scanning probe microscope and...

Details Scanning mechanism for scanning probe microscope and... Scanning mechanism for scanning probe microscope and...

2008-03-25

2008-03-25

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C250S309000, C250S306000

Reexamination Certificate

active

11262537

ABSTRACT:
A scanning probe microscope scanning mechanism has a Z stage for moving an object to be moved along the Z-axis. The Z stage includes an insulating board, a Z-direction moving actuator fixed to the insulating board, wires for the application of a voltage to the Z-direction moving actuator, and electrical connecting portions for electrically connecting the wires to the Z-direction moving actuator. The Z-direction moving actuator has a piezoelectric element that can expand and contract along the X-axis. The object is mounted on the free end of the piezoelectric element. The electrical connecting portions are provided at the fixed end of the piezoelectric element.

REFERENCES:
patent: 6346710 (2002-02-01), Ue
patent: 6617761 (2003-09-01), Ando et al.
patent: 6809306 (2004-10-01), Ando et al.
patent: 2007/0114441 (2007-05-01), Ue
patent: 2001-330425 (2001-11-01), None
patent: WO 02/057749 (2002-07-01), None

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