Scanning interference electron microscope

Details Scanning interference electron microscope Scanning interference electron microscope

2005-12-06

2008-08-26

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S492100, C250S306000, C257S014000, C257S010000, C257S009000, C257S028000, C257S030000, C438S003000, C438S105000

Reexamination Certificate

active

07417227

ABSTRACT:
The conventional detection technique has the following problems in detecting interference fringes: (1) Setting and adjustment are complex and difficult to conduct; (2) A phase image and an amplitude image cannot be displayed simultaneously; and (3) Detection efficiency of electron beams is low. The invention provides a scanning interference electron microscope which is improved in detection efficiency of electron beam interference fringes, and enables the user to observe electric and magnetic information easily in a micro domain of a specimen as a scan image of a high S/N ratio under optimum conditions.

REFERENCES:
patent: 5004918 (1991-04-01), Tsuno et al.
patent: 6163321 (2000-12-01), Kiyokawa
patent: 6759656 (2004-07-01), Tomita
patent: 8-45465 (1994-08-01), None
patent: 9-134697 (1995-11-01), None
Tanji, T., Ru Q., Tonomura, A., “Differential microscopy by conventional electron off-axis holography”, Appl. Phys. Lett. 69, 18, 1996.
Th. Leuthner et al., “STEM—Holography Using the Electron Biprism”, Phys. Stat. Sol. (a) 116, 113 (1989), pp. 113-121.

Affiliated with

Also associated with

Rating

Scanning interference electron microscope does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning interference electron microscope, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning interference electron microscope will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4003419