Scanning force microscope with removable probe illuminator assem

Details Scanning force microscope with removable probe illuminator assem Scanning force microscope with removable probe illuminator assem

1997-10-16

1999-02-23

Williams, Hezron

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

058746692

ABSTRACT:
A scanning force microscope employs a laser (76) which creates a laser beam (26). The laser and a probe assembly (24) are mounted in a removable probe illuminator assembly (22). The removable probe illumination assembly is mounted to the moving portion of a scanning mechanism. The scanning mechanism creates relative movement between the probe illuminator assembly and a sample (28). The removal of the probe illuminator assembly permits alignment of said laser beam onto a cantilever (30) after removal of said illuminator assembly from the microscope. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly.

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