Scanning force microscope with beam tracking lens

Details Scanning force microscope with beam tracking lens Scanning force microscope with beam tracking lens

1994-02-03

1995-08-15

Williams, Hezron E.

Measuring and testing

Surface and cutting edge testing

Roughness

250306, G01B 528, G01N 2100

Patent

active

054409209

ABSTRACT:
An atomic force, scanning probe microscope (AFM or SPM) having a stationary-sample stage and a scanning cantilever using an optical lever method with an S-shape PZT is described. The cantilever tip is translated to measure surface profiles while a simple lens attached to the cantilever holder guides a focused beam from a fixed collimated diode laser. This enables the change of scanners or scanning techniques in air or solution without disturbing the sample. The imaging capability is demonstrated up to 100.times.100 square micrometers.

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