4. Measuring and testing
  5. Surface and cutting edge testing
  6. Roughness

Pan S. Jung

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Atomic force microscope employing beam tracking

Measuring and testing – Surface and cutting edge testing – Roughness
Patent

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Atomic force microscope employing beam-tracking

Measuring and testing – Surface and cutting edge testing – Roughness
Patent

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Scanning force microscope with beam tracking lens

Measuring and testing – Surface and cutting edge testing – Roughness
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