Scanning force microscope having aligning and adjusting means

Details Scanning force microscope having aligning and adjusting means Scanning force microscope having aligning and adjusting means

1991-03-13

1992-10-20

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

250307, H01J 4014

Patent

active

051572516

ABSTRACT:
A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.

REFERENCES:
patent: 4935634 (1990-06-01), Hansma et al.
patent: 4999494 (1991-03-01), Elings

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