Scanning force microscope

Details Scanning force microscope Scanning force microscope

1997-10-14

1999-01-19

Raevis, Robert

Measuring and testing

Surface and cutting edge testing

Roughness

G01B 528

Patent

active

058615504

ABSTRACT:
A scanning force microscope (10) sometimes referred to as an atomic force microscope employs a laser (32) and a cantilever (28) which move proportionally to a moving reference frame (64). A fixed reference frame (11) contains optical components. A scanning mechanism creates relative movement between the fixed and moving reference frames. An optical assembly (114) is included which comprises at least one optical device in the fixed reference frame. The optical assembly permits initial alignment of the laser beam onto the cantilever and also permit the laser beam to follow the moving cantilever.

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