Scanning exposure technique

Details Scanning exposure technique Scanning exposure technique

2007-06-28

2010-10-12

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000

Reexamination Certificate

active

07812927

ABSTRACT:
A scanning exposure apparatus for performing exposure of a substrate to light includes a projection optical system to project light from the original onto the substrate, a stage to hold the substrate and to move in a scanning direction, and a focus detector to detect a position of a surface region of the substrate in a direction of the optical axis. The apparatus (i) detects the position of the surface region with respect to each of a plurality of measurement points and with respect to each of a plurality of shot regions of the substrate, (ii) averages the detected positions, (iii) obtains a function which approximates the averaged positions, (iv) calculates a difference between each of the averaged positions and a value of the obtained function, (v) offsets a detected position with a corresponding one of the calculated differences, (vi) controls a position of the stage based on the offset positions, and (vii) logs the obtained function.

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