Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1996-05-28
1998-07-07
Moses, R. L.
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, 356399, 356400, 356401, G03B 2742, G03B 2732, G01B 1100
Patent
active
057777225
ABSTRACT:
A scanning exposure apparatus is arranged to illuminate a mask, to project an image of the mask through a projection optical system onto a photosensitive substrate, and to move the mask and the photosensitive substrate relative to the projection optical system, thereby effecting exposure of an entire surface of the mask on the photosensitive substrate, and the exposure apparatus comprises a position detector which detects a relative positional relation between the mask and the photosensitive substrate; a memory which stores positional information obtained by the position detector; a position correcting device which corrects the relative positional relation between the mask and the photosensitive substrate, based on the positional information read out from the memory device; and a controller which makes the position detector detect the relative positional relation between the mask and the photosensitive substrate while the mask and the photosensitive substrate are carried past a projection region of the projection optical system to an exposure start position, and makes the position correcting device correct the relative positional relation between the mask and the photosensitive substrate, based on the positional information read out from the memory, while the mask and the photosensitive substrate are stopped at the exposure start position and/or during the exposure.
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Goto Hideji
Hamada Tomohide
Miyazaki Seiji
Nara Kei
Narabe Tsuyoshi
Moses R. L.
Nikon Corporation
Virmani Shival
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